National Microelectronics InstituteSEMI

Universal wafer mc Print E-mail

Universal Wafer Stepper designed for the MEMS market.

 

STL designed and built a universal chuck + robotic loading arm to allow the loading of any wafer size from 2 to 8 inch on the Ultratech platform. 

 

 Universal Chuck

Universal Chuck

                                             

 

 

 

 

 

 

 

 

 

 

 

 Robot Arm

robotic arm