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Stepper RefurbishmentOur refurbished Machines are set up to meet all original factory specs. Customers are invited to inspect their equipment and run full pre-acceptance tests before machines are shipped. Our 'yellow room' has all the photolithography equipment needed to run full process acceptance testing - this includes coating, develop, inspection, CD + Overlay. We also have our in-house process/applications engineers to assist customers during the pre-acceptance + later during full acceptance at their site. All our machines are offered with full Warranty! An Example of a full refurb on an Ultratech Stepper 1500 follows: ILLUMINATOR Set Up: Uniformity < 3.0%, Output> 1200mw, Components replaced: ellipsoidal mirror, blast shield, uv filter, homogenizer, lamp
STAGE Set Up: drive rods/motors, parallelism, laser system, collimation and Absolute position Components replaced: drive rods and motors, umbilical cable, laser transducer
FOCUS SYSTEM Set Up: air probes to: 2048, air cal to: .008, voice coils to: 32768, adjust/change electronics boards as necessary Components Replaced: umbilical cable, chuck
LENS SYSTEM Set Up: air probe height and level, reticle stage tilt, Arial Image 5Oμ, DOF (as per NA), Color / overlay WAS ALIGNMENT SYSTEM Set Up: A[8,1] and finger repeatability, C[2], C[4], C[6] repeatability, G[1] and G[3], BF/DF separation (<5Oμ) and diddler skew Components Replaced: WAS slider bearings, reticle finger, stepper motors (if necessary)
AUTOMATION LOADER Set Up: height and level, flat find repeatability and system gain, indexer operation, cycle test, RM5 repeatability Components Replaced: all drive belts, indexer belts, flat find pcb, stepper motors (if necessary).
TESTS (list is not exhaustive):
DOSE TIME, UNIFORMITY, PARRALLISIM, ABSOLUTE POSITION TEST, IMAGE ROTATION TEST, A[1, 1], CX/CY, RM5,S-TEST, SQUARE MOVE TEST, JIGGLE TEST, STEPPER MOTOR TEST, DIDDLER CALIBRATION, RETICLE CALIBRATION, RETICLE POSITION TEST, SSF, AIR CAL, IMAGE TILT, TUNE UP, OVERLAY DIAGNOSTICS |